Micro electro-mechanical heater
Patent
·
OSTI ID:1390064
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
- Research Organization:
- Hysitron, Inc., Eden Prairie, MN (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-07ER84812
- Assignee:
- Hysitron, Inc.
- Patent Number(s):
- 9,759,641
- Application Number:
- 14/948,549
- OSTI ID:
- 1390064
- Country of Publication:
- United States
- Language:
- English
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