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Micro electro-mechanical heater

Patent ·
OSTI ID:1247996
; ; ;
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
Research Organization:
Hysitron, Inc., Eden Prairie, MN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER84812
Assignee:
Hysitron, Inc. (Eden Prairie, MN)
Patent Number(s):
9,316,569
Application Number:
13/510,825
OSTI ID:
1247996
Country of Publication:
United States
Language:
English

References (11)

A newly developed high resolution hot stage and its application to materials characterization journal January 1993
In-situ TEM Observations on the Sintering Process of Colloidal Gold Using an Ultra-fast Heating Stage journal August 2008
An in situ TEM study of phase formation in gold-aluminum couples journal January 2004
A New Paradigm for Ultra-High-Resolution Imaging at Elevated Temperatures journal August 2008
In-situ high-resolution electron microscopy study on a surface reconstruction of Au-deposited Si at very high temperatures journal January 1997
Crystallization behaviour of ALD-Ta 2 O 5 thin films: the application of in-situ TEM journal June 2005
A MEMS-based Technology Platform for in-situ TEM Heating Studies journal August 2008
In situ Observation of Solid–liquid Interfaces by Transmission Electron Microscopy journal July 2005
In-situ TEM observation of transformation of dislocations from shuffle to glide sets in Si under supersaturation of interstitials journal October 2006
In situ high resolution electron microscopy/electron energy loss spectroscopy observation of wetting of a Si surface by molten Al journal July 2001
Direct Observation of Vapor−Liquid−Solid Nanowire Growth journal April 2001

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