Wafer level fabrication of planarized josephson junctions with TaNx Barriers.

Conference · Mon Aug 01 04:00:00 EDT 2016

OSTI ID:1380089

Henry, Michael David; Wolfley, Steven L.; Miner, John; Douglas, Erica Ann; Young, Travis Ryan; Pearce, Charles Joseph; Monson, Todd; Brunke, Lyle Brent; Lewis, Rupert M.; Missert, Nancy A.

Abstract not provided.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1380089
• Report Number(s): SAND2016-8534C; 647038
• Country of Publication: United States
• Language: English