Excimer laser surface processing of alumina substrates
Conference
·
OSTI ID:134895
- AlliedSignal Aerospace, Kansas City, KS (United States)
- Univ. of Kansas, Lawrence, KS (United States)
Irradiation by a 248 nm wavelength excimer laser beam at fluences in excess of 100 mJ/mm{sup 2} and at various angles of incidence is shown to significantly alter the surface roughness of alumina substrates. Irradiation creates a fine particulate deposit of alumina that partially adheres to the substrate and impedes subsequent deposition of metal films. Annealing in air between 1250{degrees}C and 1450{degrees}C effectively sinters the particles. As-received material showed surface roughness average (R{sub a}) mean values of 457 nm, which was reduced to 60 nm (mean) following irradiation and 71 nm (mean) following irradiation and annealing at 1350{degrees}C. Irradiation also produces a decrease in the number and severity of surface defects. The four-point bend strength and Weibull modulus were increased by laser irradiation and thermal treatment. It was concluded that irradiation at an angle of incidence of 60{degrees} from perpendicular was most effective in producing a low surface roughness.
- OSTI ID:
- 134895
- Report Number(s):
- CONF-940416--; CNN: Contract AC04-76-DP00613
- Country of Publication:
- United States
- Language:
- English
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