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Title: Growth of large aluminum nitride single crystals with thermal-gradient control

Patent ·
OSTI ID:1345375

In various embodiments, non-zero thermal gradients are formed within a growth chamber both substantially parallel and substantially perpendicular to the growth direction during formation of semiconductor crystals, where the ratio of the two thermal gradients (parallel to perpendicular) is less than 10, by, e.g., arrangement of thermal shields outside of the growth chamber.

Research Organization:
CRYSTAL IS, INC. Green Island, NY (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC26-08NT01578
Assignee:
CRYSTAL IS, INC.
Patent Number(s):
9,580,833
Application Number:
14/686,812
OSTI ID:
1345375
Resource Relation:
Patent File Date: 2015 Apr 15
Country of Publication:
United States
Language:
English

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SEMICONDUCTOR LIGHT-EMITTING DEVICE patent-application December 2009
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POLYCRYSTALLINE ALUMINUM NITRIDE MATERIAL AND METHOD OF PRODUCTION THEREOF patent-application January 2012
THICK PSEUDOMORPHIC NITRIDE EPITAXIAL LAYERS patent-application May 2012
P-CONTACT AND LIGHT-EMITTING DIODE FOR THE ULTRAVIOLET SPECTRAL RANGE patent-application June 2012
LIGHT EMITTING DEVICES, SYSTEMS, AND METHODS OF MANUFACTURING patent-application January 2013
ULTRAVIOLET LIGHT EMITTING DEVICES HAVING ENHANCED LIGHT EXTRACTION patent-application April 2013
ULTRAVIOLET LIGHT EMITTING DEVICE INCORPORTING OPTICALLY ABSORBING LAYERS patent-application April 2013
LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM patent-application June 2013
DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH patent-application June 2013
METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE patent-application March 2014
LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM patent-application April 2014
PHOTON EXTRACTION FROM NITRIDE ULTRAVIOLET LIGHT-EMITTING DEVICES patent-application July 2014
DOPED ALUMINUM NITRIDE CRYSTALS AND METHODS OF MAKING THEM patent-application August 2014
PSEUDOMORPHIC ELECTRONIC AND OPTOELECTRONIC DEVICES HAVING PLANAR CONTACTS patent-application September 2014
DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH patent-application January 2015
METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE patent-application March 2015
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