Development of Charge Drain Coatings: Final CRADA Report
- Argonne National Lab. (ANL), Argonne, IL (United States)
The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE; Defense Advanced Research Projects Agency (DARPA)
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1341008
- Report Number(s):
- ANL/ESD-C1201101; 132984
- Country of Publication:
- United States
- Language:
- English
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