Development of Charge Drain Coatings: Final CRADA Report
Abstract
The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).
- Authors:
-
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE; Defense Advanced Research Projects Agency (DARPA)
- OSTI Identifier:
- 1341008
- Report Number(s):
- ANL/ESD-C1201101
132984
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Technical Report
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States: N. p., 2017.
Web. doi:10.2172/1341008.
Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States. https://doi.org/10.2172/1341008
Elam, Jeffrey W. 2017.
"Development of Charge Drain Coatings: Final CRADA Report". United States. https://doi.org/10.2172/1341008. https://www.osti.gov/servlets/purl/1341008.
@article{osti_1341008,
title = {Development of Charge Drain Coatings: Final CRADA Report},
author = {Elam, Jeffrey W.},
abstractNote = {The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).},
doi = {10.2172/1341008},
url = {https://www.osti.gov/biblio/1341008},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 17 00:00:00 EST 2017},
month = {Tue Jan 17 00:00:00 EST 2017}
}
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