Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.
Conference
·
OSTI ID:1336347
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1336347
- Report Number(s):
- SAND2015-8721C; 615265
- Resource Relation:
- Conference: Proposed for presentation at the SPIE Laser Damage Symposium held September 27-30, 2015 in Boulder, CO.
- Country of Publication:
- United States
- Language:
- English
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