Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.
Abstract
Abstract not provided.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1336347
- Report Number(s):
- SAND2015-8721C
615265
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: Proposed for presentation at the SPIE Laser Damage Symposium held September 27-30, 2015 in Boulder, CO.
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, and Rudolph, Wolfgang. Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.. United States: N. p., 2015.
Web.
Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, & Rudolph, Wolfgang. Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.. United States.
Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, and Rudolph, Wolfgang. 2015.
"Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.". United States. https://www.osti.gov/servlets/purl/1336347.
@article{osti_1336347,
title = {Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.},
author = {Xu, Yejia and Schiltz, Drew and Emmert, Luke and Brown, Andrew and Talghader, Joseph and Kletecka, Damon E. and Field, Ella Suzanne and Bellum, John Curtis and Patel, Dinesh and Menoni, Carmen and Rudolph, Wolfgang},
abstractNote = {Abstract not provided.},
doi = {},
url = {https://www.osti.gov/biblio/1336347},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 01 00:00:00 EDT 2015},
month = {Thu Oct 01 00:00:00 EDT 2015}
}
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