Lithographically defined microporous carbon-composite structures
Patent
·
OSTI ID:1334643
A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 9,513,554
- Application Number:
- 14/749,328
- OSTI ID:
- 1334643
- Country of Publication:
- United States
- Language:
- English
Tunable Young's Modulus in Carbon MEMS Using Graphene-Based Stiffeners
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journal | March 2013 |
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