Determination of electron concentration in an RF discharge using a Fabri-Perot cavity
Journal Article
·
· Instruments and Experimental Techniques
OSTI ID:133152
- St. Petersburg State Technical Univ. (Russian Federation)
A method of determining the electron concentration in an RF discharge plasma in diode systems based on measuring the parameters of a Fabri-Perot cavity in the 6-10 mm wavelength band is described. The cavity is formed by the aluminum electrodes of a discharge chamber, and its Q-factor in experiments can reach 2000. The detection limit with respect to electron concentration is 4{center_dot}10{sup 8} cm{sup -3}.
- OSTI ID:
- 133152
- Journal Information:
- Instruments and Experimental Techniques, Journal Name: Instruments and Experimental Techniques Journal Issue: 3 Vol. 37; ISSN 0020-4412; ISSN INETAK
- Country of Publication:
- United States
- Language:
- English
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