Impedance characteristic of the GEC reference cell
- Univ. of Illinois, Urbana, IL (United States)
- Sandia National Lab., Albuquerque, NM (United States)
One can make measurements of the electrical parameters (V, I, P) at the access terminals of a reactor, but it is more desirable to relate those parameters to that at the plasma terminals. Toward that end, the authors have made precision impedance measurements over the range of 1-108 MHz on the GEC RF Reference Cell with the plasma terminals open circuited, short circuited and inductively loaded. This enables them to infer an equivalent circuit which is consistent with the geometry of the cell and which agrees with the input measurements to a high degree of accuracy. Using this circuit, one can relate the plasma quantities to the terminal values with the standard ABCD matrix which is valid at all frequencies. The procedure for inferring this circuit and accounting for the resistive losses will be presented.
- OSTI ID:
- 127910
- Report Number(s):
- CONF-920376--; CNN: Contract DE-FI04-89AL58872
- Journal Information:
- Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 9 Vol. 37; ISSN BAPSA6; ISSN 0003-0503
- Country of Publication:
- United States
- Language:
- English
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