A comparison of PIC simulation and experimental results in a capacitive RF discharge

Journal Article · Mon Nov 30 23:00:00 EST 1992 · Bulletin of the American Physical Society

OSTI ID:127905

Mirrashidi, P; Wood, B P; Vahedi, V ^[1]

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1. Univ. of California, Berkeley, CA (United States); and others

Simulation results for PDP1, a 1d3v bounded particle-in-cell code, are compared to recently published experimental results over a pressure range of 10-100 mTorr and 100-1000 V applied RF voltage in a symmetric, parallel plate, argon discharge. The authors show that where similar results are obtained, the simulation allows insight into plasma parameters which are not experimentally accessible, such as details of the electron power sources and losses.

• OSTI ID: 127905
• Report Number(s): CONF-920376--
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 9 Vol. 37; ISSN 0003-0503; ISSN BAPSA6
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ARGON
HIGH-FREQUENCY DISCHARGES
P CODES
PLASMA SIMULATION