Novel plasma polymerized films under dc glow discharge
Conference
·
OSTI ID:126976
- Tokyo Institute of Technology (Japan)
It has been reported that various dielectric films can be readily prepared by plasma polymerization, but these films have been made using AC glow discharge at a specific frequency (such as RF). in this paper, we examined the plasma polymerization of non-fluorinated and fluorinated aromatic hydrocarbons using a new plasma polymerization system that used DC glow discharge. Features of this DC system are; (1) polymerization proceeds under an isotropic electric field, (2) density of cations around the substrate on the cathode is high, (3) the polymer that accumulates during the initial stage is exposed to the DC discharge for a long period of time, (4) depth profile of the polymer films is isotropic, especially when polar monomers are used. The results of ESCA of plasma polymerized films indicated that the content of fluorine in the polymer films was isotropic with the film depth. Dielectric properties of the films were also examined.
- OSTI ID:
- 126976
- Report Number(s):
- CONF-950402--
- Country of Publication:
- United States
- Language:
- English
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