The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry

Journal Article · Fri Oct 01 00:00:00 EDT 1999 · IEEE Transactions on Semiconductor Manufacturing

OSTI ID:12690

JAREK, RUSSELL L; THORNBERG, STEVEN M

Flammable deposits have been analyzed from the exhaust systems of tools employing dichlorosilane (DCS) as a processing gas. Exact mass determinations with a high-resolution Fourier-transform ion-cyclotron resonance (FT-ICR) mass spectrometer allowed the identification of various polysiloxane species present in such an exhaust flow. Ion-molecule reactions indicate the preferred reaction pathway of siloxane formation is through HCl loss, leading to the highly reactive polysiloxane that was detected in the flammable deposits.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 12690
• Report Number(s): SAND99-2563J; TRN: AH200120%%395
• Journal Information: IEEE Transactions on Semiconductor Manufacturing, Other Information: Submitted to IEEE Transactions on Semiconductor Manufacturing; PBD: 1 Oct 1999
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
54 ENVIRONMENTAL SCIENCES
TOOLS
ORGANIC CHLORINE COMPOUNDS
SILANES
FOURIER TRANSFORM SPECTROMETERS
MASS SPECTROMETERS
SILOXANES
GAS ANALYSIS
EXHAUST GASES
DEPOSITS
FLAMMABILITY
INDOOR AIR POLLUTION