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Title: The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry

Abstract

Flammable deposits have been analyzed from the exhaust systems of tools employing dichlorosilane (DCS) as a processing gas. Exact mass determinations with a high-resolution Fourier-transform ion-cyclotron resonance (FT-ICR) mass spectrometer allowed the identification of various polysiloxane species present in such an exhaust flow. Ion-molecule reactions indicate the preferred reaction pathway of siloxane formation is through HCl loss, leading to the highly reactive polysiloxane that was detected in the flammable deposits.

Authors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
12690
Report Number(s):
SAND99-2563J
TRN: AH200120%%395
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
IEEE Transactions on Semiconductor Manufacturing
Additional Journal Information:
Other Information: Submitted to IEEE Transactions on Semiconductor Manufacturing; PBD: 1 Oct 1999
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 54 ENVIRONMENTAL SCIENCES; TOOLS; ORGANIC CHLORINE COMPOUNDS; SILANES; FOURIER TRANSFORM SPECTROMETERS; MASS SPECTROMETERS; SILOXANES; GAS ANALYSIS; EXHAUST GASES; DEPOSITS; FLAMMABILITY; INDOOR AIR POLLUTION

Citation Formats

JAREK, RUSSELL L, and THORNBERG, STEVEN M. The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry. United States: N. p., 1999. Web.
JAREK, RUSSELL L, & THORNBERG, STEVEN M. The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry. United States.
JAREK, RUSSELL L, and THORNBERG, STEVEN M. 1999. "The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry". United States. https://www.osti.gov/servlets/purl/12690.
@article{osti_12690,
title = {The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry},
author = {JAREK, RUSSELL L and THORNBERG, STEVEN M},
abstractNote = {Flammable deposits have been analyzed from the exhaust systems of tools employing dichlorosilane (DCS) as a processing gas. Exact mass determinations with a high-resolution Fourier-transform ion-cyclotron resonance (FT-ICR) mass spectrometer allowed the identification of various polysiloxane species present in such an exhaust flow. Ion-molecule reactions indicate the preferred reaction pathway of siloxane formation is through HCl loss, leading to the highly reactive polysiloxane that was detected in the flammable deposits.},
doi = {},
url = {https://www.osti.gov/biblio/12690}, journal = {IEEE Transactions on Semiconductor Manufacturing},
number = ,
volume = ,
place = {United States},
year = {Fri Oct 01 00:00:00 EDT 1999},
month = {Fri Oct 01 00:00:00 EDT 1999}
}