Lightwave Circuits in Lithium Niobate through Hybrid Waveguides with Silicon Photonics

Weigel, Peter O.; Savanier, Marc; DeRose, Christopher T.; Pomerene, Andrew T.; Starbuck, Andrew L.; Lentine, Anthony L.; Stenger, Vincent; Mookherjea, Shayan

doi:10.1038/srep22301

Lightwave Circuits in Lithium Niobate through Hybrid Waveguides with Silicon Photonics

Journal Article · Tue Mar 01 00:00:00 EST 2016 · Scientific Reports

DOI:https://doi.org/10.1038/srep22301· OSTI ID:1261098

Weigel, Peter O. ^[1]; Savanier, Marc ^[1]; DeRose, Christopher T. ^[2]; Pomerene, Andrew T. ^[2]; Starbuck, Andrew L. ^[2]; Lentine, Anthony L. ^[2]; Stenger, Vincent ^[3]; Mookherjea, Shayan ^[1]

Univ. of California, San Diego, CA (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
SRICO Inc., Columbus, OH (United States)

Here we demonstrate a photonic waveguide technology based on a two-material core, in which light is controllably and repeatedly transferred back and forth between sub-micron thickness crystalline layers of Si and LN bonded to one another, where the former is patterned and the latter is not. In this way, the foundry-based wafer-scale fabrication technology for silicon photonics can be leveraged to form lithium-niobate based integrated optical devices. Using two different guided modes and an adiabatic mode transition between them, we demonstrate a set of building blocks such as waveguides, bends, and couplers which can be used to route light underneath an unpatterned slab of LN, as well as outside the LN-bonded region, thus enabling complex and compact lightwave circuits in LN alongside Si photonics with fabrication ease and low cost.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1261098

Alternate ID(s):: OSTI ID: 1262310

Report Number(s):: SAND--2016-6437J; srep22301

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 6; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

References (46)

Optical waveguide loaded with high refractive-index strip film Uchida, Naoya Applied Optics, Vol. 15, Issue 1 https://doi.org/10.1364/ao.15.000179	journal	January 1976
Optical strip waveguide: an experiment Ogusu, Kazuhiko; Tanaka, Ikuo Applied Optics, Vol. 19, Issue 19 https://doi.org/10.1364/ao.19.003322	journal	January 1980
Photorefractive effect in LiNbO_3 directional couplers Mueller, Craig T.; Garmire, Elsa Applied Optics, Vol. 23, Issue 23 https://doi.org/10.1364/ao.23.004348	journal	January 1984
Tailored anomalous group-velocity dispersion in silicon channel waveguides Turner, Amy C.; Manolatou, Christina; Schmidt, Bradley S. Optics Express, Vol. 14, Issue 10 https://doi.org/10.1364/oe.14.004357	journal	January 2006
Compact electric field sensors based on indirect bonding of lithium niobate to silicon microrings Chen, Li; Reano, Ronald M. Optics Express, Vol. 20, Issue 4 https://doi.org/10.1364/oe.20.004032	journal	January 2012
Waveguides in single-crystal lithium niobate thin film by proton exchange Cai, Lutong; Han, Shuang Li Huangpu; Hu, Hui Optics Express, Vol. 23, Issue 2 https://doi.org/10.1364/oe.23.001240	journal	January 2015
Nanotaper for compact mode conversion Almeida, Vilson R.; Panepucci, Roberto R.; Lipson, Michal Optics Letters, Vol. 28, Issue 15 https://doi.org/10.1364/ol.28.001302	journal	January 2003
Losses in single-mode silicon-on-insulator strip waveguides and bends Vlasov, Yurii A.; McNab, Sharee J. Optics Express, Vol. 12, Issue 8 https://doi.org/10.1364/opex.12.001622	journal	January 2004
Mid-infrared integrated waveguide modulators based on silicon-on-lithium-niobate photonics Chiles, Jeff; Fathpour, Sasan Optica, Vol. 1, Issue 5 https://doi.org/10.1364/optica.1.000350	journal	January 2014
Moore's law in photonics Smit, M.; van der Tol, J.; Hill, M. Laser & Photonics Reviews, Vol. 6, Issue 1 https://doi.org/10.1002/lpor.201100001	journal	September 2011
Laser direct writing: Enabling monolithic and hybrid integrated solutions on the lithium niobate platform Thomas, Jens; Heinrich, Matthias; Zeil, Peter physica status solidi (a), Vol. 208, Issue 2 https://doi.org/10.1002/pssa.201026452	journal	August 2010
Ultra-smooth LiNbO3 micro and nano structures for photonic applications Ulliac, Gwenn; Guichardaz, Blandine; Rauch, Jean-Yves Microelectronic Engineering, Vol. 88, Issue 8 https://doi.org/10.1016/j.mee.2011.02.024	journal	August 2011
Adhesion quantification methods for wafer bonding Vallin, Örjan; Jonsson, Kerstin; Lindberg, Ulf Materials Science and Engineering: R: Reports, Vol. 50, Issue 4-5 https://doi.org/10.1016/j.mser.2005.07.002	journal	December 2005
Optical and structural properties of single-crystal lithium niobate thin film Han, Huangpu; Cai, Lutong; Hu, Hui Optical Materials, Vol. 42 https://doi.org/10.1016/j.optmat.2014.12.016	journal	April 2015
Electro–optically tunable microring resonators in lithium niobate Guarino, Andrea; Poberaj, Gorazd; Rezzonico, Daniele Nature Photonics, Vol. 1, Issue 7 https://doi.org/10.1038/nphoton.2007.93	journal	July 2007
Towards fabless silicon photonics Hochberg, Michael; Baehr-Jones, Tom Nature Photonics, Vol. 4, Issue 8 https://doi.org/10.1038/nphoton.2010.172	journal	August 2010
On-chip process variation monitoring circuit based on gate leakage sensing Kim, K. K.; Ge, F.; Choi, K. Electronics Letters, Vol. 46, Issue 3 https://doi.org/10.1049/el.2010.2867	journal	January 2010
Growth of highly textured LiNbO ₃ thin film on Si with MgO buffer layer through the sol‐gel process Yoon, Jong‐Gul; Kim, Kun Applied Physics Letters, Vol. 68, Issue 18 https://doi.org/10.1063/1.115842	journal	April 1996
Fabrication of single-crystal lithium niobate films by crystal ion slicing Levy, M.; Osgood, R. M.; Liu, R. Applied Physics Letters, Vol. 73, Issue 16 https://doi.org/10.1063/1.121801	journal	October 1998
Room-temperature bonding of lithium niobate and silicon wafers by argon-beam surface activation Takagi, Hideki; Maeda, Ryutaro; Hosoda, Naoe Applied Physics Letters, Vol. 74, Issue 16 https://doi.org/10.1063/1.123860	journal	April 1999
Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding Rabiei, Payam; Gunter, Peter Applied Physics Letters, Vol. 85, Issue 20 https://doi.org/10.1063/1.1819527	journal	November 2004
Lithium niobate ridge waveguides and modulators fabricated using smart guide Rabiei, Payam; Steier, William H. Applied Physics Letters, Vol. 86, Issue 16 https://doi.org/10.1063/1.1906311	journal	April 2005
Room temperature bonding of silicon and lithium niobate Howlader, M. M. R.; Suga, T.; Kim, M. J. Applied Physics Letters, Vol. 89, Issue 3 https://doi.org/10.1063/1.2229262	journal	July 2006
Optically induced crosstalk in LiNbO ₃ waveguide switches Schmidt, R. V.; Cross, P. S.; Glass, A. M. Journal of Applied Physics, Vol. 51, Issue 1 https://doi.org/10.1063/1.327307	journal	January 1980
Preparation and characterization of LiNbO ₃ thin films produced by chemical‐vapor deposition Sakashita, Yukio; Segawa, Hideo Journal of Applied Physics, Vol. 77, Issue 11 https://doi.org/10.1063/1.359183	journal	June 1995
Mechanisms for room temperature direct wafer bonding Plach, T.; Hingerl, K.; Tollabimazraehno, S. Journal of Applied Physics, Vol. 113, Issue 9 https://doi.org/10.1063/1.4794319	journal	March 2013
Lithium niobate integrated optics Lawrence, M. Reports on Progress in Physics, Vol. 56, Issue 3 https://doi.org/10.1088/0034-4885/56/3/001	journal	March 1993
Large Dispersion of Silicon Directional Couplers Obtained via Wideband Microring Parametric Characterization Aguinaldo, R.; Shen, Yiran; Mookherjea, S. IEEE Photonics Technology Letters, Vol. 24, Issue 14, p. 1242-1244 https://doi.org/10.1109/LPT.2012.2198639	journal	July 2012
Low-temperature bonding of a LiNbO 3 waveguide chip to a Si substrate in ambient air for hybrid-integrated optical devices Takigawa, Ryo; Higurashi, Eiji; Suga, Tadatomo Optics East 2006, SPIE Proceedings https://doi.org/10.1117/12.690741	conference	October 2006
High-density integrated optics in ion-sliced lithium niobate thin films Poberaj, Gorazd; Koechlin, Manuel; Sulser, Frederik OPTO, SPIE Proceedings https://doi.org/10.1117/12.840660	conference	February 2010
Optical waveguide loaded with high refractive-index strip film Uchida, Naoya Applied Optics, Vol. 15, Issue 1 https://doi.org/10.1364/AO.15.000179	journal	January 1976
Optical strip waveguide: an experiment Ogusu, Kazuhiko; Tanaka, Ikuo Applied Optics, Vol. 19, Issue 19 https://doi.org/10.1364/AO.19.003322	journal	January 1980
Photorefractive effect in LiNbO_3 directional couplers Mueller, Craig T.; Garmire, Elsa Applied Optics, Vol. 23, Issue 23 https://doi.org/10.1364/AO.23.004348	journal	January 1984
Heterogeneous Microring and Mach-Zehnder Lithium Niobate Electro-Optical Modulators on Silicon Rao, Ashutosh; Patil, Aniket; Chiles, Jeff CLEO: 2015 https://doi.org/10.1364/CLEO_SI.2015.STu2F.4	conference	January 2015
Tailored anomalous group-velocity dispersion in silicon channel waveguides Turner, Amy C.; Manolatou, Christina; Schmidt, Bradley S. Optics Express, Vol. 14, Issue 10 https://doi.org/10.1364/OE.14.004357	journal	January 2006
Lithium niobate photonic wires Hu, H.; Ricken, R.; Sohler, W. Optics Express, Vol. 17, Issue 26 https://doi.org/10.1364/OE.17.024261	journal	January 2009
Compact electric field sensors based on indirect bonding of lithium niobate to silicon microrings Chen, Li; Reano, Ronald M. Optics Express, Vol. 20, Issue 4 https://doi.org/10.1364/OE.20.004032	journal	January 2012
Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method Takigawa, Ryo; Higurashi, Eiji; Kawanishi, Tetsuya Optics Express, Vol. 22, Issue 22 https://doi.org/10.1364/OE.22.027733	journal	January 2014
Waveguides in single-crystal lithium niobate thin film by proton exchange Cai, Lutong; Han, Shuang Li Huangpu; Hu, Hui Optics Express, Vol. 23, Issue 2 https://doi.org/10.1364/OE.23.001240	journal	January 2015
Waveguides consisting of single-crystal lithium niobate thin film and oxidized titanium stripe Li, Shuang; Cai, Lutong; Wang, Yiwen Optics Express, Vol. 23, Issue 19 https://doi.org/10.1364/OE.23.024212	journal	January 2015
Nanotaper for compact mode conversion Almeida, Vilson R.; Panepucci, Roberto R.; Lipson, Michal Optics Letters, Vol. 28, Issue 15 https://doi.org/10.1364/OL.28.001302	journal	January 2003
Hybrid Si-LiNbO_3 microring electro-optically tunable resonators for active photonic devices Lee, Yoo Seung; Kim, Gun-Duk; Kim, Woo-Ju Optics Letters, Vol. 36, Issue 7 https://doi.org/10.1364/OL.36.001119	journal	January 2011
Losses in single-mode silicon-on-insulator strip waveguides and bends Vlasov, Yurii A.; McNab, Sharee J. Optics Express, Vol. 12, Issue 8 https://doi.org/10.1364/OPEX.12.001622	journal	January 2004
Integrated Optical Devices in Lithium Niobate Sohler, Wolfgang; Hu, Hui; Ricken, Raimund Optics and Photonics News, Vol. 19, Issue 1 https://doi.org/10.1364/OPN.19.1.000024	journal	January 2008
Hybrid silicon and lithium niobate electro-optical ring modulator Chen, Li; Xu, Qiang; Wood, Michael G. Optica, Vol. 1, Issue 2 https://doi.org/10.1364/OPTICA.1.000112	journal	January 2014
Mid-infrared integrated waveguide modulators based on silicon-on-lithium-niobate photonics Chiles, Jeff; Fathpour, Sasan Optica, Vol. 1, Issue 5 https://doi.org/10.1364/OPTICA.1.000350	journal	January 2014

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Second harmonic microscopy of poled x-cut thin film lithium niobate: Understanding the contrast mechanism Rüsing, M.; Zhao, J.; Mookherjea, S. Journal of Applied Physics, Vol. 126, Issue 11 https://doi.org/10.1063/1.5113727	journal	September 2019
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