Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers

Li, Nan; Yadav, Satyesh K.; Wang, Jian; Liu, Xiang -Yang; Misra, Amit

doi:10.1038/srep18554

Growth and stress-induced transformation of zinc blende AlN layers in Al-AlN-TiN multilayers

Journal Article · Fri Dec 18 00:00:00 EST 2015 · Scientific Reports

DOI:https://doi.org/10.1038/srep18554· OSTI ID:1259302

Li, Nan ^[1]; Yadav, Satyesh K. ^[2]; Wang, Jian ^[3]; Liu, Xiang -Yang ^[2]; Misra, Amit ^[4]

Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Physics and Applications Division
Los Alamos National Lab. (LANL), Los Alamos, NM (United States). Materials Science and Technology Division
Univ. of Nebraska, Lincoln, NE (United States)
Univ. of Michigan, Ann Arbor, MI (United States)

We report that AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.

View Accepted Manuscript (DOE)

Research Organization:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

OSTI ID:: 1259302

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 5; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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