Nanopatterned articles produced using surface-reconstructed block copolymer films

Russell, Thomas P.; Park, Soojin; Wang, Jia-Yu; Kim, Bokyung

Nanopatterned articles produced using surface-reconstructed block copolymer films

Patent · Tue Jun 07 04:00:00 EDT 2016

OSTI ID:1256017

Russell, Thomas P.; Park, Soojin; Wang, Jia-Yu; Kim, Bokyung

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.

View Patent

Research Organization:: THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ER45612

Assignee:: THE UNIVERSITY OF MASSACHUSETTS (Boston, MA)

Patent Number(s):: 9,358,750

Application Number:: 13/944,329

OSTI ID:: 1256017

Country of Publication:: United States

Language:: English

References (33)

Block copolymers as bilevel resists Hartney, M. A.; Novembre, A. E.; , F. S. Bates Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346 https://doi.org/10.1116/1.582991	journal	September 1985
One step fabrication and characterization of platinum nanopore electrode ensembles formed via amphiphilic block copolymer self-assembly Wang, Chengyin; Shao, Xiaoqiu; Liu, Qingxiu Electrochimica Acta, Vol. 52, Issue 2, p. 704-709 https://doi.org/10.1016/j.electacta.2006.06.003	journal	October 2006
Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces: Parallel, Perpendicular and Mixed Lamellar Morphologies Pereira, G. G.; Williams, D. R. M. Macromolecules, Vol. 32, Issue 3, p. 758-764 https://doi.org/10.1021/ma981003n	journal	February 1999
Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors Kim, Bokyung; Hong, Sung Woo; Park, Soojin Soft Matter, Vol. 7, Issue 2, p. 443-447 https://doi.org/10.1039/C0SM00422G	journal	January 2011
Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves Chuang, Vivian P.; Cheng, Joy Y.; Savas, Tim A. Nano Letters, Vol. 6, Issue 10, p. 2332-2337 https://doi.org/10.1021/nl061866r	journal	October 2006
Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films Rockford, L.; Mochrie, S. G. J.; Russell, T. P. Macromolecules, Vol. 34, Issue 5, p. 1487-1492 https://doi.org/10.1021/ma001747c	journal	February 2001
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates Ouk Kim, Sang; Solak, Harun H.; Stoykovich, Mark P. Nature, Vol. 424, Issue 6947, p. 411-414 https://doi.org/10.1038/nature01775	journal	July 2003
Block copolymers and conventional lithography Stoykovich, Mark P.; Nealey, Paul F. Materials Today, Vol. 9, Issue 9, p. 20-29 https://doi.org/10.1016/S1369-7021(06)71619-4	journal	September 2006
Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films Kim, B. J.; Chiu, J. J.; Yi, G.-R. Advanced Materials, Vol. 17, Issue 21, p. 2618-2622 https://doi.org/10.1002/adma.200500502	journal	November 2005
Lithography with a mask of block copolymer microstructures Harrison, Christopher Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544 https://doi.org/10.1116/1.589860	journal	March 1998
Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane) Temple, K.; Kulbaba, K.; Power-Billard, K. N. Advanced Materials, Vol. 15, Issue 4, p. 297-300 https://doi.org/10.1002/adma.200390071	journal	February 2003
Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors Chan, Vanessa Z.-H.; Hoffman, James; Lee, Victor Y. Science, Vol. 286, Issue 5445, p. 1716-1719 https://doi.org/10.1126/science.286.5445.1716	journal	November 1999
Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer Zhu, Lei; Huang, Ping; Chen, William Y. Macromolecules, Vol. 35, Issue 9, p. 3553-3562 https://doi.org/10.1021/ma012184n	journal	April 2002
Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates Bal, M.; Ursache, A.; Tuominen, M. T. Applied Physics Letters, Vol. 81, Issue 18, p. 3479-3481 https://doi.org/10.1063/1.1517400	journal	October 2002
Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment Fukunaga, Kenji; Elbs, Hubert; Magerle, Robert Macromolecules, Vol. 33, Issue 3, p. 947-953 https://doi.org/10.1021/ma9910639	journal	February 2000
Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications Lammertink, Rob G. H.; Hempenius, Mark A.; Chan, Vanessa Z.-H. Chemistry of Materials, Vol. 13, Issue 2, p. 429-434 https://doi.org/10.1021/cm001052q	journal	February 2001
Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film Elhadj, S.; Woody, J. W.; Niu, V. S. Applied Physics Letters, Vol. 82, Issue 6, p. 871-873 https://doi.org/10.1063/1.1543253	journal	February 2003
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques Gates, Byron D.; Xu, Qiaobing; Stewart, Michael Chemical Reviews, Vol. 105, Issue 4, p. 1171-1196 https://doi.org/10.1021/cr030076o	journal	April 2005
Enabling nanotechnology with self assembled block copolymer patterns Park, Cheolmin; Yoon, Jongseung; Thomas, Edwin L. Polymer, Vol. 44, Issue 22, p. 6725-6760 https://doi.org/10.1016/j.polymer.2003.08.011	journal	October 2003
Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces Heier, Jakob; Kramer, Edward J.; Walheim, Stefan Macromolecules, Vol. 30, Issue 21, p. 6610-6614 https://doi.org/10.1021/ma961686b	journal	October 1997
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication Black, C. T.; Guarini, K. W.; Milkove, K. R. Applied Physics Letters, Vol. 79, Issue 3, p. 409-411 https://doi.org/10.1063/1.1383805	journal	July 2001
Nanoscale patterning using self-assembled polymers for semiconductor applications Guarini, K. W.; Black, C. T.; Milkove, K. R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784 https://doi.org/10.1116/1.1421551	journal	January 2001
Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent Park, Cheolmin; De Rosa, Claudio; Thomas, Edwin L. Macromolecules, Vol. 34, Issue 8, p. 2602-2606 https://doi.org/10.1021/ma0018603	journal	April 2001
Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates Yang, Xiao M.; Peters, Richard D.; Nealey, Paul F. Macromolecules, Vol. 33, Issue 26, p. 9575-9582 https://doi.org/10.1021/ma001326v	journal	December 2000
Modeling copolymer adsorption on laterally heterogeneous surfaces Huang, Kanglin; Balazs, Anna C. Physical Review Letters, Vol. 66, Issue 5, p. 620-623 https://doi.org/10.1103/PhysRevLett.66.620	journal	February 1991
Ultrahigh Pore Density Nanoporous Films Produced by the Phase Separation of Eutectic Al–Si for Template-Assisted Growth of Nanowire Array Fukutani, K.; Tanji, K.; Motoi, T. Advanced Materials, Vol. 16, Issue 16, p. 1456-1460 https://doi.org/10.1002/adma.200400268	journal	August 2004
A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates Park, Soojin; Wang, Jia-Yu; Kim, Bokyung ACS Nano, Vol. 2, Issue 4, p. 766-772 https://doi.org/10.1021/nn7004415	journal	April 2008
Ordering and Melting of Block Copolymer Spherical Domains in 2 and 3 Dimensions Segalman, Rachel A.; Hexemer, Alexander; Hayward, Ryan C. Macromolecules, Vol. 36, Issue 9, p. 3272-3288 https://doi.org/10.1021/ma021367m	journal	May 2003
Block Copolymer Thin Films: Physics and Applications Fasolka, Michael J.; Mayes, Anne M. Annual Review of Materials Research, Vol. 31, Issue 1, p. 323-355 https://doi.org/10.1146/annurev.matsci.31.1.323	journal	August 2001
Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers Xu, Ting; Hawker, Craig J.; Russell, Thomas P. Macromolecules, Vol. 36, Issue 16, p. 6178-6182 https://doi.org/10.1021/ma034511s	journal	August 2003
Nanoporous Gold Films Created Using Templates Formed from Self-Assembled Structures of Inorganic–Block Copolymer Micelles Haupt, M.; Miller, S.; Glass, R. Advanced Materials, Vol. 15, Issue 10, p. 829-831 https://doi.org/10.1002/adma.200304688	journal	May 2003
Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces del Campo, Aránzazu; Arzt, Eduard Chemical Reviews, Vol. 108, Issue 3, p. 911-945 https://doi.org/10.1021/cr050018y	journal	March 2008
Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top–Down and Bottom–Up Approaches Du, P.; Li, M.; Douki, K. Advanced Materials, Vol. 16, Issue 12, p. 953-957 https://doi.org/10.1002/adma.200306189	journal	June 2004

Similar Records

Nanopatterned articles produced using reconstructed block copolymer films

Patent · Tue May 02 00:00:00 EDT 2017 · OSTI ID:1354817

Method of producing nanopatterned articles using surface-reconstructed block copolymer films

Patent · Tue Aug 27 00:00:00 EDT 2013 · OSTI ID:1093291

Method of producing nanopatterned articles, and articles produced thereby

Patent · Tue Apr 28 00:00:00 EDT 2015 · OSTI ID:1178670

Related Subjects

36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY

Nanopatterned articles produced using surface-reconstructed block copolymer films

Citation Formats

References (33)

Similar Records

Related Subjects