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Title: Conformal Polymer CVD

Book ·
OSTI ID:1252638

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
OSTI ID:
1252638
Report Number(s):
LLNL-BOOK-658857
Country of Publication:
United States
Language:
English