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Title: Microresonator electrode design

Abstract

A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator.

Inventors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1252195
Patent Number(s):
9,337,800
Application Number:
13/649,025
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Oct 10
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Olsson, III, Roy H., Wojciechowski, Kenneth, and Branch, Darren W. Microresonator electrode design. United States: N. p., 2016. Web.
Olsson, III, Roy H., Wojciechowski, Kenneth, & Branch, Darren W. Microresonator electrode design. United States.
Olsson, III, Roy H., Wojciechowski, Kenneth, and Branch, Darren W. Tue . "Microresonator electrode design". United States. doi:. https://www.osti.gov/servlets/purl/1252195.
@article{osti_1252195,
title = {Microresonator electrode design},
author = {Olsson, III, Roy H. and Wojciechowski, Kenneth and Branch, Darren W.},
abstractNote = {A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 10 00:00:00 EDT 2016},
month = {Tue May 10 00:00:00 EDT 2016}
}

Patent:

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Works referenced in this record:

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
journal, November 2007

  • Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
  • Solid-State Electronics, Vol. 51, Issue 11-12, p. 1596-1608
  • DOI: 10.1016/j.sse.2007.09.037