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Origins and mitigation of spurious modes in aluminum nitride microresonators.

Conference ·
OSTI ID:1028435
Recently reported narrow bandwidth, <;2%, aluminum nitride microresonator filters in the 100-500 MHz range offer lower insertion loss, 100x smaller size, and elimination of large external matching networks, when compared to similar surface acoustic wave filters. While the initial results are promising, many microresonators exhibit spurious responses both close and far from the pass band which degrade the out of band rejection and prevent the synthesis of useful filters. This paper identifies the origins of several unwanted modes in overtone width extensional aluminum nitride microresonators and presents techniques for mitigating the spurious responses.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1028435
Report Number(s):
SAND2010-7412C
Country of Publication:
United States
Language:
English

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