Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

Riha, Shannon C.; Koegel, Alexandra A.; Meng, Xiangbo; Kim, In Soo; Cao, Yanqiang; Pellin, Michael J.; Elam, Jeffrey W.; Martinson, Alex B.  F.

doi:10.1021/acsami.5b11075

Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

Journal Article · Tue Jan 19 00:00:00 EST 2016 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.5b11075· OSTI ID:1248178

Riha, Shannon C. ^[1]; Koegel, Alexandra A. ^[1]; Meng, Xiangbo ^[2]; Kim, In Soo ^[3]; Cao, Yanqiang ^[2]; Pellin, Michael J. ^[3]; Elam, Jeffrey W. ^[2]; Martinson, Alex B. F. ^[3]

Univ. of Wisconsin, Stevens Point, WI (United States). Dept. of Chemistry
Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division

Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure r-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase, consisting of both r- and a-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS) allow the derivation of a self-consistent reaction mechanism. Lastly, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER); Energy Frontier Research Centers (EFRC) (United States). Center for Electrical Energy Storage (CEES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); USDOE Office of Science (SC), Workforce Development for Teachers and Scientists (WDTS) (SC-27)

Grant/Contract Number:: AC02-06CH11357; SC0001059

OSTI ID:: 1248178

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 4 Vol. 8; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Synthesis of Thin‐Film Metal Pyrites by an Atomic Layer Deposition Approach Wang, Jue; Guo, Zheng; Xiong, Wei Chemistry – A European Journal, Vol. 24, Issue 70 https://doi.org/10.1002/chem.201803327	journal	October 2018
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An aminopyridinato Mn( ii ) compound as a novel CVD precursor for manganese-containing films Du, Liyong; Yu, Shaoshan; Liu, Xinfang New Journal of Chemistry, Vol. 42, Issue 6 https://doi.org/10.1039/c8nj00062j	journal	January 2018
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