PLZT capacitor on glass substrate
Patent
·
OSTI ID:1244223
A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-06CH11357
- Assignee:
- Delphi Technologies, Inc. (Troy, MI) UChicago Argonne, LLC (Chicago, IL)
- Patent Number(s):
- 9,299,496
- Application Number:
- 14/873,532
- OSTI ID:
- 1244223
- Country of Publication:
- United States
- Language:
- English
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