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Title: PLZT capacitor on glass substrate

Abstract

A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1234681
Patent Number(s):
9,230,739
Application Number:
14/065,837
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 29
Country of Publication:
United States
Language:
English
Subject:
25 ENERGY STORAGE; 36 MATERIALS SCIENCE

Citation Formats

Fairchild, M. Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine W. K., Ma, Beihai, and Balachandran, Uthamalingam. PLZT capacitor on glass substrate. United States: N. p., 2016. Web.
Fairchild, M. Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine W. K., Ma, Beihai, & Balachandran, Uthamalingam. PLZT capacitor on glass substrate. United States.
Fairchild, M. Ray, Taylor, Ralph S., Berlin, Carl W., Wong, Celine W. K., Ma, Beihai, and Balachandran, Uthamalingam. Tue . "PLZT capacitor on glass substrate". United States. doi:. https://www.osti.gov/servlets/purl/1234681.
@article{osti_1234681,
title = {PLZT capacitor on glass substrate},
author = {Fairchild, M. Ray and Taylor, Ralph S. and Berlin, Carl W. and Wong, Celine W. K. and Ma, Beihai and Balachandran, Uthamalingam},
abstractNote = {A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 05 00:00:00 EST 2016},
month = {Tue Jan 05 00:00:00 EST 2016}
}

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