Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study
Journal Article
·
· Nanotechnology
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1238991
- Journal Information:
- Nanotechnology, Vol. 27, Issue 3; ISSN 0957-4484
- Publisher:
- IOP PublishingCopyright Statement
- Country of Publication:
- United Kingdom
- Language:
- English
Cited by: 12 works
Citation information provided by
Web of Science
Web of Science
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Development characteristics of polymethyl methacrylate in alcohol/water mixtures. A lithography and Raman spectroscopy study
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Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study
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OSTI ID:1238991
Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study
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Thu Dec 10 00:00:00 EST 2015
· Nanotechnology
·
OSTI ID:1238991