Etching mechanisms of graphene nanoribbons in downstream H 2 plasmas: insights from molecular dynamics simulations

Davydova, A.; Despiau-Pujo, E.; Cunge, G.; Graves, D. B.

doi:10.1088/0022-3727/48/19/195202

Etching mechanisms of graphene nanoribbons in downstream H ₂ plasmas: insights from molecular dynamics simulations

Journal Article · Thu Apr 02 00:00:00 EDT 2015 · Journal of Physics. D, Applied Physics

DOI:https://doi.org/10.1088/0022-3727/48/19/195202· OSTI ID:1238884

Davydova, A.; Despiau-Pujo, E.; Cunge, G.; Graves, D. B.

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Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

OSTI ID:: 1238884

Alternate ID(s):: OSTI ID: 22498480

Journal Information:: Journal of Physics. D, Applied Physics, Journal Name: Journal of Physics. D, Applied Physics Journal Issue: 19 Vol. 48; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (35)

An Anisotropic Etching Effect in the Graphene Basal Plane Yang, Rong; Zhang, Lianchang; Wang, Yi Advanced Materials, Vol. 22, Issue 36 https://doi.org/10.1002/adma.201000618	journal	August 2010
Densely aligned graphene nanoribbons at ∼35 nm pitch Jiao, Liying; Xie, Liming; Dai, Hongjie Nano Research, Vol. 5, Issue 4 https://doi.org/10.1007/s12274-012-0209-2	journal	March 2012
Large scale nanopatterning of graphene Neumann, P. L.; Tóvári, E.; Csonka, S. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 282 https://doi.org/10.1016/j.nimb.2011.08.044	journal	July 2012
Graphene nano-ribbon electronics Chen, Zhihong; Lin, Yu-Ming; Rooks, Michael J. Physica E: Low-dimensional Systems and Nanostructures, Vol. 40, Issue 2, p. 228-232 https://doi.org/10.1016/j.physe.2007.06.020	journal	December 2007
Selective Etching of Graphene Edges by Hydrogen Plasma Xie, Liming; Jiao, Liying; Dai, Hongjie Journal of the American Chemical Society, Vol. 132, Issue 42 https://doi.org/10.1021/ja107071g	journal	October 2010
Graphene Chemistry: Synthesis and Manipulation Sun, Zhengzong; James, Dustin K.; Tour, James M. The Journal of Physical Chemistry Letters, Vol. 2, Issue 19 https://doi.org/10.1021/jz201000a	journal	September 2011
Properties of Fluorinated Graphene Films Robinson, Jeremy T.; Burgess, James S.; Junkermeier, Chad E. Nano Letters, Vol. 10, Issue 8 https://doi.org/10.1021/nl101437p	journal	August 2010
Reversible Basal Plane Hydrogenation of Graphene Ryu, Sunmin; Han, Melinda Y.; Maultzsch, Janina Nano Letters, Vol. 8, Issue 12 https://doi.org/10.1021/nl802940s	journal	December 2008
Hydrogenation, Purification, and Unzipping of Carbon Nanotubes by Reaction with Molecular Hydrogen: Road to Graphane Nanoribbons Talyzin, Alexandr V.; Luzan, Serhiy; Anoshkin, Ilya V. ACS Nano, Vol. 5, Issue 6 https://doi.org/10.1021/nn201224k	journal	April 2011
Extreme Monolayer-Selectivity of Hydrogen-Plasma Reactions with Graphene Diankov, Georgi; Neumann, Michael; Goldhaber-Gordon, David ACS Nano, Vol. 7, Issue 2 https://doi.org/10.1021/nn304903m	journal	January 2013
Sequential Electrochemical Unzipping of Single-Walled Carbon Nanotubes to Graphene Ribbons Revealed by in Situ Raman Spectroscopy and Imaging John, Robin; Shinde, Dhanraj B.; Liu, Lili ACS Nano, Vol. 8, Issue 1 https://doi.org/10.1021/nn403289g	journal	December 2013
Material history: Learning from silicon Segal, Michael Nature, Vol. 483, Issue 7389 https://doi.org/10.1038/483S43a	journal	March 2012
Atomically precise bottom-up fabrication of graphene nanoribbons Cai, Jinming; Ruffieux, Pascal; Jaafar, Rached Nature, Vol. 466, Issue 7305 https://doi.org/10.1038/nature09211	journal	July 2010
Etching and narrowing of graphene from the edges Wang, Xinran; Dai, Hongjie Nature Chemistry, Vol. 2, Issue 8, p. 661-665 https://doi.org/10.1038/nchem.719	journal	June 2010
Atomic layers of hybridized boron nitride and graphene domains Ci, Lijie; Song, Li; Jin, Chuanhong Nature Materials, Vol. 9, Issue 5, p. 430-435 https://doi.org/10.1038/nmat2711	journal	February 2010
Graphene: nanoscale processing and recent applications Biró, László P.; Nemes-Incze, Péter; Lambin, Philippe Nanoscale, Vol. 4, Issue 6 https://doi.org/10.1039/C1NR11067E	journal	January 2012
A computer simulation method for the calculation of equilibrium constants for the formation of physical clusters of molecules: Application to small water clusters Swope, William C.; Andersen, Hans C.; Berens, Peter H. The Journal of Chemical Physics, Vol. 76, Issue 1 https://doi.org/10.1063/1.442716	journal	January 1982
Molecular dynamics with coupling to an external bath Berendsen, H. J. C.; Postma, J. P. M.; van Gunsteren, W. F. The Journal of Chemical Physics, Vol. 81, Issue 8 https://doi.org/10.1063/1.448118	journal	October 1984
Elementary processes of H ₂ plasma-graphene interaction: A combined molecular dynamics and density functional theory study Despiau-Pujo, E.; Davydova, A.; Cunge, G. Journal of Applied Physics, Vol. 113, Issue 11 https://doi.org/10.1063/1.4794375	journal	March 2013
A second-generation reactive empirical bond order (REBO) potential energy expression for hydrocarbons Brenner, Donald W.; Shenderova, Olga A.; Harrison, Judith A. Journal of Physics: Condensed Matter, Vol. 14, Issue 4 https://doi.org/10.1088/0953-8984/14/4/312	journal	January 2002
From graphene constrictions to single carbon chains Chuvilin, Andrey; Meyer, Jannik C.; Algara-Siller, Gerardo New Journal of Physics, Vol. 11, Issue 8 https://doi.org/10.1088/1367-2630/11/8/083019	journal	August 2009
New empirical approach for the structure and energy of covalent systems Tersoff, J. Physical Review B, Vol. 37, Issue 12 https://doi.org/10.1103/PhysRevB.37.6991	journal	April 1988
Edge state in graphene ribbons: Nanometer size effect and edge shape dependence Nakada, Kyoko; Fujita, Mitsutaka; Dresselhaus, Gene Physical Review B, Vol. 54, Issue 24 https://doi.org/10.1103/PhysRevB.54.17954	journal	December 1996
Graphane: A two-dimensional hydrocarbon Sofo, Jorge O.; Chaudhari, Ajay S.; Barber, Greg D. Physical Review B, Vol. 75, Issue 15 https://doi.org/10.1103/PhysRevB.75.153401	journal	April 2007
Reconstruction and evaporation at graphene nanoribbon edges Lee, Gun-Do; Wang, C. Z.; Yoon, Euijoon Physical Review B, Vol. 81, Issue 19 https://doi.org/10.1103/PhysRevB.81.195419	journal	May 2010
Reversible fluorination of graphene: Evidence of a two-dimensional wide bandgap semiconductor Cheng, S. -H.; Zou, K.; Okino, F. Physical Review B, Vol. 81, Issue 20 https://doi.org/10.1103/PhysRevB.81.205435	journal	May 2010
First-principles investigation of graphene fluoride and graphane Leenaerts, O.; Peelaers, H.; Hernández-Nieves, A. D. Physical Review B, Vol. 82, Issue 19 https://doi.org/10.1103/PhysRevB.82.195436	journal	November 2010
Deriving Carbon Atomic Chains from Graphene Jin, Chuanhong; Lan, Haiping; Peng, Lianmao Physical Review Letters, Vol. 102, Issue 20 https://doi.org/10.1103/PhysRevLett.102.205501	journal	May 2009
Energy Gaps in Graphene Nanoribbons Son, Young-Woo; Cohen, Marvin L.; Louie, Steven G. Physical Review Letters, Vol. 97, Issue 21 https://doi.org/10.1103/PhysRevLett.97.216803	journal	November 2006
Energy Band-Gap Engineering of Graphene Nanoribbons Han, Melinda Y.; Özyilmaz, Barbaros; Zhang, Yuanbo Physical Review Letters, Vol. 98, Issue 20 https://doi.org/10.1103/PhysRevLett.98.206805	journal	May 2007
MD simulations of GaN sputtering by Ar+ ions: Ion-induced damage and near-surface modification under continuous bombardment Despiau-Pujo, Emilie; Chabert, Pascal Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 28, Issue 5 https://doi.org/10.1116/1.3460904	journal	September 2010
MD simulations of low energy Cl _x ⁺ ions interaction with ultrathin silicon layers for advanced etch processes Brichon, Paulin; Despiau-Pujo, Emilie; Joubert, Olivier Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 2 https://doi.org/10.1116/1.4827016	journal	March 2014
Electronic Confinement and Coherence in Patterned Epitaxial Graphene Berger, C. Science, Vol. 312, Issue 5777 https://doi.org/10.1126/science.1125925	journal	May 2006
Chaotic Dirac Billiard in Graphene Quantum Dots Ponomarenko, L. A.; Schedin, F.; Katsnelson, M. I. Science, Vol. 320, Issue 5874, p. 356-358 https://doi.org/10.1126/science.1154663	journal	April 2008
Control of Graphene's Properties by Reversible Hydrogenation: Evidence for Graphane Elias, D. C.; Nair, R. R.; Mohiuddin, T. M. G. Science, Vol. 323, Issue 5914 https://doi.org/10.1126/science.1167130	journal	January 2009

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Etching mechanisms of graphene nanoribbons in downstream H ₂ plasmas: insights from molecular dynamics simulations