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Nanoscale deformation analysis with high-resolution transmission electron microscopy and digital image correlation

Journal Article · · Journal of Applied Mechanics
DOI:https://doi.org/10.1115/1.4031332· OSTI ID:1237660
 [1];  [1];  [1];  [2];  [3];  [2];  [1];  [1]
  1. Georgia Inst. of Technology, Atlanta, GA (United States)
  2. Univ. of Pittsburgh, Pittsburgh, PA (United States)
  3. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We present an application of the digital image correlation (DIC) method to high-resolution transmission electron microscopy (HRTEM) images for nanoscale deformation analysis. The combination of DIC and HRTEM offers both the ultrahigh spatial resolution and high displacement detection sensitivity that are not possible with other microscope-based DIC techniques. We demonstrate the accuracy and utility of the HRTEM-DIC technique through displacement and strain analysis on amorphous silicon. Two types of error sources resulting from the transmission electron microscopy (TEM) image noise and electromagnetic-lens distortions are quantitatively investigated via rigid-body translation experiments. The local and global DIC approaches are applied for the analysis of diffusion- and reaction-induced deformation fields in electrochemically lithiated amorphous silicon. As a result, the DIC technique coupled with HRTEM provides a new avenue for the deformation analysis of materials at the nanometer length scales.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1237660
Report Number(s):
SAND--2015-4991J; 594412
Journal Information:
Journal of Applied Mechanics, Journal Name: Journal of Applied Mechanics Journal Issue: 12 Vol. 82; ISSN 0021-8936
Publisher:
ASMECopyright Statement
Country of Publication:
United States
Language:
English

References (67)

Hybrid analytical and extended finite element method (HAX-FEM): A new enrichment procedure for cracked solids: HAX-FEM: A NEW ENRICHMENT PROCEDURE FOR CRACKED SOLIDS
  • Réthoré, Julien; Roux, Stéphane; Hild, François
  • International Journal for Numerical Methods in Engineering, Vol. 81, Issue 3 https://doi.org/10.1002/nme.2691
journal July 2009
Transmission Electron Microscopy book January 2009
SEM-DIC Based Nanoscale Thermal Deformation Studies of Heterogeneous Material book August 2013
Submicron deformation field measurements: Part 1. Developing a digital scanning tunneling microscope journal March 1998
Digital image correlation using Newton-Raphson method of partial differential correction journal September 1989
Submicron deformation field measurements: Part 2. Improved digital image correlation journal June 1998
Applications of digital-image-correlation techniques to experimental mechanics journal September 1985
Submicron deformation field measurements: Part 3. Demonstration of deformation determinations journal September 1998
Deformation measurements by digital image correlation: Implementation of a second-order displacement gradient journal December 2000
A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy journal March 2002
Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS journal December 2006
“Finite-Element” Displacement Fields Analysis from Digital Images: Application to Portevin–Le Châtelier Bands journal December 2006
Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part II: Experimental Validation for Magnifications from 200 to 10,000 journal March 2007
Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part I: SEM Imaging at Magnifications from 200 to 10,000 journal March 2007
Overview of Identification Methods of Mechanical Parameters Based on Full-field Measurements journal July 2008
Assessment of Digital Image Correlation Measurement Errors: Methodology and Results journal December 2008
Digital Image Correlation for Improved Detection of Basal Cell Carcinoma journal January 2010
Comparison of Local and Global Approaches to Digital Image Correlation journal March 2012
Self-Assembled Nanoparticle Surface Patterning for Improved Digital Image Correlation in a Scanning Electron Microscope journal March 2013
Digital Image Correlation under Scanning Electron Microscopy: Methodology and Validation journal July 2013
Comparison of Subset-Based Local and Finite Element-Based Global Digital Image Correlation journal February 2015
Microstructure-Dependent Local Strain Behavior in Polycrystals through In-Situ Scanning Electron Microscope Tensile Experiments journal August 2009
Determination of displacements using an improved digital correlation method journal August 1983
Application of an optimized digital correlation method to planar deformation analysis journal August 1986
Quantitative analysis of strain field in thin films from HRTEM micrographs journal April 1998
Mechanical measurements at the micron and nanometer scales journal March 2003
Relationships between residual stress, microstructure and mechanical properties of electron beam–physical vapor deposition thermal barrier coatings journal October 1998
Quantitative measurement of displacement and strain fields from HREM micrographs journal August 1998
The use of full-field measurement methods in composite material characterization: interest and limitations journal July 2004
Mixed-mode crack propagation using a Hybrid Analytical and eXtended Finite Element Method journal March 2010
Shape evolution of patterned amorphous and polycrystalline silicon microarray thin film electrodes caused by lithium insertion and extraction journal October 2012
In-plane strain measurements on a microscopic scale by coupling digital image correlation and an in situ SEM technique journal January 2006
Strain characterization in SOI and strained-Si on SGOI MOSFET channel using nano-beam electron diffraction (NBD) journal December 2005
Shearography: An optical measurement technique and applications journal April 2005
Non-contact technique for characterizing full-field surface deformation of shape memory polymers at elevated and room temperatures journal February 2011
Microstructures and textures of pure magnesium deformed in plane-strain compression journal November 2004
Measurement of nanodisplacements and elastic properties of MEMS via the microscopic hole method journal April 2005
Room design for high-performance electron microscopy journal October 2006
Evaluation of two-dimensional strain distribution by STEM/NBD journal July 2011
Transmission Electron Microscopy of Shape-Controlled Nanocrystals and Their Assemblies journal February 2000
Two-Phase Electrochemical Lithiation in Amorphous Silicon journal January 2013
In Situ Atomic Force Microscopy of Lithiation and Delithiation of Silicon Nanostructures for Lithium Ion Batteries journal September 2013
Velocity field of the “La Clapière” landslide measured by the correlation of aerial and QuickBird satellite images journal January 2004
Nanoscale holographic interferometry for strain measurements in electronic devices journal June 2008
Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices journal March 2003
Measurement of residual stresses in micromachined structures in a microregion journal February 2006
Direct strain measurement in a 65nm node strained silicon transistor by convergent-beam electron diffraction journal October 2006
Metrology in a scanning electron microscope: theoretical developments and experimental validation journal August 2006
Two-dimensional digital image correlation for in-plane displacement and strain measurement: a review journal April 2009
Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing journal February 2005
AFM image reconstruction for deformation measurements by digital image correlation journal January 2006
Nanoscale deformation measurement of microscale interconnection assemblies by a digital image correlation technique journal September 2007
Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices journal February 2005
Higher Order Laue Zone Effects in Electron Diffraction and their Use in Lattice Parameter Determination
  • Jones, P. M.; Rackham, G. M.; Steeds, J. W.
  • Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 354, Issue 1677 https://doi.org/10.1098/rspa.1977.0064
journal May 1977
Structure of evaporated pure amorphous silicon: Neutron-diffraction and reverse Monte Carlo investigations journal September 1993
Structural study of a -Si and a -Si:H films by EXAFS and Raman-scattering spectroscopy journal October 1994
High-energy x-ray diffraction study of pure amorphous silicon journal November 1999
Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution journal April 2007
Mechanics of Thin Films and Microdevices journal June 2004
In Situ Nanoscale In-Plane Deformation Studies of Ultrathin Polymeric Films During Tensile Deformation Using Atomic Force Microscopy and Digital Image Correlation Techniques journal January 2007
Digital Imaging Techniques In Experimental Stress Analysis journal June 1982
Structure, electrical and magnetic properties, and the origin of the room temperature ferromagnetism in Mn-implanted Si journal October 2009
Convergence Properties of the Nelder--Mead Simplex Method in Low Dimensions journal January 1998
Reaction of Li with Alloy Thin Films Studied by In Situ AFM journal January 2003
Microscopic Strain Mapping Using Scanning Electron Microscopy Topography Image Correlation at Large Strain journal August 2005
Micro-scale deformation measurement using the digital image correlation technique and scanning electron microscope imaging journal August 2008
Finite element formulation for a digital image correlation method journal January 2005

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