Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition.

Craciun, D.; Socol, G.; Lambers, E.; McCumiskey, E. J.; Taylor, C. R.; Martin, C.; Argibay, Nicolas; Craciun, V.; Tanner, D. B.

doi:10.1016/j.apsusc.2015.01.076

Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition.

Journal Article · Sat Jan 17 00:00:00 EST 2015 · Applied Surface Science

DOI:https://doi.org/10.1016/j.apsusc.2015.01.076· OSTI ID:1236229

Craciun, D. ^[1]; Socol, G. ^[1]; Lambers, E. ^[2]; McCumiskey, E. J. ^[2]; Taylor, C. R. ^[2]; Martin, C. ^[3]; Argibay, Nicolas ^[4]; Craciun, V. ^[1]; Tanner, D. B. ^[2]

National Institute for Laser, Plasma, and Radiation Physics, Magurele (Romania)
Univ. of Florida, Gainesville, FL (United States)
Ramapo College of New Jersey, Mahwah, NJ (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Thin ZrC films (<500 nm) were grown on (100) Si substrates at a substrate temperature of 500 °C by the pulsed laser deposition (PLD) technique using a KrF excimer laser under different CH₄ pressures. Glancing incidence X-ray diffraction showed that films were nanocrystalline, while X-ray reflectivity studies found out films were very dense and exhibited a smooth surface morphology. Optical spectroscopy data shows that the films have high reflectivity (>90%) in the infrared region, characteristic of metallic behavior. Nanoindentation results indicated that films deposited under lower CH₄ pressures exhibited slightly higher nanohardness and Young modulus values than films deposited under higher pressures. As a result, tribological characterization revealed that these films exhibited relatively high wear resistance and steady-state friction coefficients on the order of μ = 0.4.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); unfunded

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1236229

Alternate ID(s):: OSTI ID: 22573182
OSTI ID: 1247552

Report Number(s):: SAND--2015-0364J; 562238

Journal Information:: Applied Surface Science, Journal Name: Applied Surface Science Journal Issue: C Vol. 352; ISSN 0169-4332

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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77 NANOSCIENCE AND NANOTECHNOLOGY
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Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition.

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