SUMMiTView
Software
·
OSTI ID:1230900
The SummitView compute code is designed to generate a 3D solid model, amenable to visualization, that represents the end state of a microsystem fabrication process such as the SUMMiT 9Sandia Ultra-Planar Multilevel MEMS Technology) V process. As input it requires a definition of both the process itself and the collection of individual 2D masks created by the designer and associated with each of the process steps. The code is written in C++ and consists of a set of classes and routines. The classes represent the geometric data and the SUMMiT V process steps. Classes are provided for the following process steps: Planar Deposition, Conformal Deposition, Dry Etch, Wet Etch and Release Etch.
- Short Name / Acronym:
- SUMMiTView; 001965IBMPC00
- Version:
- 00
- Programming Language(s):
- Medium: X; OS: Windows 2000 and up; Compatibility: PC
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94Al8500
- OSTI ID:
- 1230900
- Country of Origin:
- United States
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