Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

Saha, Bivas; Lawrence, Samantha K.; Schroeder, Jeremy L.; Birch, Jens; Bahr, David F.; Sands, Timothy D.

doi:10.1063/1.4898067

Title: Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

Journal Article · Tue Oct 14 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4898067· OSTI ID:1223555

Saha, Bivas ^[1]; Lawrence, Samantha K. ^[2]; Schroeder, Jeremy L. ^[3]; Birch, Jens ^[3]; Bahr, David F. ^[2]; Sands, Timothy D. ^[4]

School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA
Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: CBET-1048616

OSTI ID:: 1223555

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 105 Journal Issue: 15; ISSN 0003-6951

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 19 works

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References (33)

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