Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices

Saha, Bivas; Koh, Yee Rui; Feser, Joseph P.; Sadasivam, Sridhar; Fisher, Timothy S.; Shakouri, Ali; Sands, Timothy D.

doi:10.1063/1.4973681

Title: Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices

Journal Article · Sat Jan 07 00:00:00 EST 2017 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4973681· OSTI ID:1361732

Saha, Bivas ^[1]; Koh, Yee Rui ^[2]; Feser, Joseph P. ^[3]; Sadasivam, Sridhar ^[4];

^[4]; Shakouri, Ali ^[2]; Sands, Timothy D. ^[5]

Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
Department of Mechanical Engineering, University of Delaware, Newark, Delaware 19716, USA
Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907, USA
Bradley Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: CBET-1048616

OSTI ID:: 1361732

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Vol. 121 Journal Issue: 1; ISSN 0021-8979

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 35 works

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References (28)

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