Effect of ion fluence on the surface morphology of single crystal magnesium oxide implanted with xenon
- Department of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920 (United States)
- Surface Modification and Characterization Research Facility, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
The surface morphology of (001)-oriented single crystal magnesium oxide (MgO) implanted with xenon ions has been examined using atomic force microscopy. It was found that at the lowest fluence used in this study (1.0{times}10{sup 14}/cm{sup 2}), slight roughening of the (001) surface occurred. The magnitude of this roughening remained fairly constant with increases in fluence in the range 1.0{times}10{sup 14}/cm{sup 2} to 3.0{times}10{sup 16}/cm{sup 2}. Implantation at fluences of {ge}1.0{times}10{sup 17}/cm{sup 2} caused significant surface roughening with the concomitant formation of micro-sized blisters. The appearance of some of these blisters resembles the rosette pattern which is also observed when the cleaved surfaces of MgO crystals are etched following indentation using a spherical indenter. This observation suggests that these blisters are formed by the growth of xenon inclusions, during implantation, by a dislocation loop punching mechanism. {copyright} 1995 {ital Materials} {ital Research} {ital Society}.
- Research Organization:
- Oak Ridge National Laboratory
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 122304
- Journal Information:
- Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 11 Vol. 10; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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