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Title: Studies of Relaxation Processes and Basal Plane Dislocations in CVD Grown Homoepitaxial Layers of 4H-SiC

Journal Article · · ECS Transactions

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
INDUSTRY
OSTI ID:
1212217
Journal Information:
ECS Transactions, Vol. 64, Issue (7) ; 2014; ISSN 1938-5862
Country of Publication:
United States
Language:
ENGLISH

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