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Title: High numerical aperture multilayer Laue lenses

Journal Article · · Scientific Reports
DOI:https://doi.org/10.1038/srep09892· OSTI ID:1208858
 [1];  [1];  [2];  [3];  [1];  [1];  [1];  [1];  [1];  [1];  [4];  [1];  [5];  [6];  [1]
  1. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany)
  2. Univ. of Bialystok (Poland)
  3. SLAC National Accelerator Lab., Menlo Park, CA (United States)
  4. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany); Univ. of Hamburg (Germany).
  5. Eurpean XFEL GmbH, Hamburg (Germany)
  6. Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany); Centre for Ultrafast Umaging, Hamburg (Germany); Univ. of Hamburg (Germany).

The ever-increasing brightness of synchrotron radiation sources demands improved X-ray optics to utilise their capability for imaging and probing biological cells, nanodevices, and functional matter on the nanometer scale with chemical sensitivity. Here we demonstrate focusing a hard X-ray beam to an 8 nm focus using a volume zone plate (also referred to as a wedged multilayer Laue lens). This lens was constructed using a new deposition technique that enabled the independent control of the angle and thickness of diffracting layers to microradian and nanometer precision, respectively. This ensured that the Bragg condition is satisfied at each point along the lens, leading to a high numerical aperture that is limited only by its extent. We developed a phase-shifting interferometric method based on ptychography to characterise the lens focus. The precision of the fabrication and characterisation demonstrated here provides the path to efficient X-ray optics for imaging at 1 nm resolution.

Research Organization:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC03-76SF00515
OSTI ID:
1208858
Journal Information:
Scientific Reports, Vol. 5; ISSN 2045-2322
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 74 works
Citation information provided by
Web of Science

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Cited By (41)

7 nm Spatial Resolution in Soft X-ray Microscopy journal August 2018
X-ray focusing with efficient high-NA multilayer Laue lenses journal November 2017
Interlaced zone plate optics for hard X-ray imaging in the 10 nm range journal March 2017
50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors journal April 2017
One dimensional focusing with high numerical aperture multilayer Laue lens
  • Bajt, Saša; Prasciolu, Mauro; Morgan, Andrew J.
  • XRM 2014: Proceedings of the 12th International Conference on X-Ray Microscopy, AIP Conference Proceedings https://doi.org/10.1063/1.4937543
conference January 2016
Development and characterization of monolithic multilayer Laue lens nanofocusing optics journal June 2016
Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses journal March 2017
Multilayer Laue Lens: A Brief History and Current Status journal July 2016
Terahertz wave manipulation based on multi-bit coding artificial electromagnetic surfaces journal April 2018
High resolution tip-tilt positioning system for a next generation MLL-based x-ray microscope journal November 2017
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science journal March 2018
Simulating and optimizing compound refractive lens-based X-ray microscopes journal February 2017
Translative lens-based full-field coherent X-ray imaging journal January 2020
PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector conference September 2017
Aberration correction for hard x-ray focusing at the nanoscale conference September 2017
Ptychographic Nano-Analytical Microscope (PtyNAMi) at PETRA III: signal-to-background optimization for imaging with high sensitivity conference September 2019
Zone Plates for X-Ray Focusing (Review) journal November 2017
Numerical study of Bragg CDI on thick polycrystalline specimens journal January 2018
Dose efficient Compton X-ray microscopy journal January 2018
Multi-slice ptychography with large numerical aperture multilayer Laue lenses journal January 2018
Multiscale 3D characterization with dark-field x-ray microscopy journal June 2016
On the Properties of WC/SiC Multilayers text January 2018
Multilayer Laue lenses at high x-ray energies: Performance and applications text January 2019
Ptychographic characterization of polymer compound refractive lenses manufactured by additive technology text January 2019
Ptychographic X-ray speckle tracking text January 2020
Ptychographic X-ray speckle tracking journal May 2020
Multilayer Laue lenses at high X-ray energies: performance and applications journal January 2019
One dimensional focusing with high numerical aperture multilayer Laue lens text January 2016
PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector text January 2017
X-ray focusing with efficient high-NA multilayer Laue lenses text January 2017
Aberration correction for hard x-ray focusing at the nanoscale text January 2017
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On the Properties of WC/SiC Multilayers journal April 2018
Ptychographic Nano-Analytical Microscope (PtyNAMi) at PETRA III: signal-to-background optimization for imaging with high sensitivity text January 2019
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Ellipsoidal mirror for two-dimensional 100-nm focusing in hard X-ray region journal November 2017
Stimulated scintillation emission depletion X-ray imaging journal January 2017
Ptychographic characterization of polymer compound refractive lenses manufactured by additive technology text January 2018

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