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Title: Microfabricated bulk wave acoustic bandgap device

Abstract

A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).

Inventors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1176346
Patent Number(s):
7,733,198
Application Number:
11/748,832
Assignee:
Sandia Corporation
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Olsson, Roy H., El-Kady, Ihab F., McCormick, Frederick, Fleming, James G., and Fleming, Carol. Microfabricated bulk wave acoustic bandgap device. United States: N. p., 2010. Web.
Olsson, Roy H., El-Kady, Ihab F., McCormick, Frederick, Fleming, James G., & Fleming, Carol. Microfabricated bulk wave acoustic bandgap device. United States.
Olsson, Roy H., El-Kady, Ihab F., McCormick, Frederick, Fleming, James G., and Fleming, Carol. Tue . "Microfabricated bulk wave acoustic bandgap device". United States. https://www.osti.gov/servlets/purl/1176346.
@article{osti_1176346,
title = {Microfabricated bulk wave acoustic bandgap device},
author = {Olsson, Roy H. and El-Kady, Ihab F. and McCormick, Frederick and Fleming, James G. and Fleming, Carol},
abstractNote = {A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).},
doi = {},
url = {https://www.osti.gov/biblio/1176346}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {6}
}

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