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Vertically aligned nanostructure scanning probe microscope tips

Patent ·
OSTI ID:1176036
Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
7,151,256
Application Number:
10/716,770
OSTI ID:
1176036
Country of Publication:
United States
Language:
English

References (23)

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Scanning probe metrology
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