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Title: Hydraulically amplified PZT mems actuator

Abstract

A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.

Inventors:
Publication Date:
Research Org.:
The Regents of the University of California, Oakland, CA (United States); Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175106
Patent Number(s):
6,811,133
Application Number:
10/218,890
Assignee:
The Regents of the University of California (Oakland, CA) OSTI
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Miles, Robin R. Hydraulically amplified PZT mems actuator. United States: N. p., 2004. Web.
Miles, Robin R. Hydraulically amplified PZT mems actuator. United States.
Miles, Robin R. Tue . "Hydraulically amplified PZT mems actuator". United States. doi:. https://www.osti.gov/servlets/purl/1175106.
@article{osti_1175106,
title = {Hydraulically amplified PZT mems actuator},
author = {Miles, Robin R.},
abstractNote = {A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 02 00:00:00 EST 2004},
month = {Tue Nov 02 00:00:00 EST 2004}
}

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