Microoptoelectromechanical system (MOEMS) based laser
Abstract
A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.
- Inventors:
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174566
- Patent Number(s):
- 6,643,313
- Application Number:
- 09/849,922
- Assignee:
- UT Battelee, LLC (Oak Ridge, TN)
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Hutchinson, Donald P. Microoptoelectromechanical system (MOEMS) based laser. United States: N. p., 2003.
Web.
Hutchinson, Donald P. Microoptoelectromechanical system (MOEMS) based laser. United States.
Hutchinson, Donald P. Tue .
"Microoptoelectromechanical system (MOEMS) based laser". United States. https://www.osti.gov/servlets/purl/1174566.
@article{osti_1174566,
title = {Microoptoelectromechanical system (MOEMS) based laser},
author = {Hutchinson, Donald P.},
abstractNote = {A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.},
doi = {},
url = {https://www.osti.gov/biblio/1174566},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {11}
}