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Thin film transistors on plastic substrates with reflective coatings for radiation protection

Patent ·
OSTI ID:1174560

Fabrication of silicon thin film transistors (TFT) on low-temperature plastic substrates using a reflective coating so that inexpensive plastic substrates may be used in place of standard glass, quartz, and silicon wafer-based substrates. The TFT can be used in large area low cost electronics, such as flat panel displays and portable electronics such as video cameras, personal digital assistants, and cell phones.

Research Organization:
The Regents of the University of California, Oakland, CA (United States) ; Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
6,642,085
Application Number:
09/705,484
OSTI ID:
1174560
Country of Publication:
United States
Language:
English

References (1)

Use of hafnium dioxide in multilayer dielectric reflectors for the near uv journal January 1977

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