Nanomechanical electric and electromagnetic field sensor

Datskos, Panagiotis George; Lavrik, Nickolay

Title: Nanomechanical electric and electromagnetic field sensor

Patent · Tue Mar 24 00:00:00 EDT 2015

OSTI ID:1174187

Datskos, Panagiotis George; Lavrik, Nickolay

The present invention provides a system for detecting and analyzing at least one of an electric field and an electromagnetic field. The system includes a micro/nanomechanical oscillator which oscillates in the presence of at least one of the electric field and the electromagnetic field. The micro/nanomechanical oscillator includes a dense array of cantilevers mounted to a substrate. A charge localized on a tip of each cantilever interacts with and oscillates in the presence of the electric and/or electromagnetic field. The system further includes a subsystem for recording the movement of the cantilever to extract information from the electric and/or electromagnetic field. The system further includes a means of adjusting a stiffness of the cantilever to heterodyne tune an operating frequency of the system over a frequency range.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-00OR22725

Assignee:: U.S. Department of Energy (Washington, DC)

Patent Number(s):: 8,988,061

Application Number:: 13/024,833

OSTI ID:: 1174187

Resource Relation:: Patent File Date: 2011 Feb 10

Country of Publication:: United States

Language:: English

References (14)

Nanomechanical electric and electromagnetic field sensor Datskos, Panagiotis G.; Lavrik, Nickolay V. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8988061 US Patent Document 8,988,061	patent	March 2015
Micromechanical electronic oscillator Farace, Louis P.; King, Adrian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4721925 US Patent Document 4,721,925	patent	January 1988
Self-excited microelectromechanical device White, Richard M.; Lee, Seung-gun; Bustillo, James https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5696491 US Patent Document 5,696,491	patent	December 1997
Temperature insensitive silicon oscillator and precision voltage reference formed therefrom Weinberg, Marc S.; Ward, Paul A.; Kourepenis, Anthony S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5783973 US Patent Document 5,783,973	patent	July 1998
Micromachining method and micromachined structure Muramatsu, Hiroshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5976390 US Patent Document 5,976,390	patent	November 1999
Mechanical sensors of electromagnetic fields Weitekamp, Daniel P.; Lambert, Bruce https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6835926 US Patent Document 6,835,926	patent	December 2004
Position and electromagnetic field sensor Gregg, John Francis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6984994 US Patent Document 6,984,994	patent	January 2006
MOS electronic article surveillance, RF and/or RF identification tag/device, and methods for making and using the same MacKenzie, J. Devin; Cleeves, James M.; Pavate, Vik https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7152804 US Patent Document 7,152,804	patent	December 2006
Method of measuring electric field distribution and electric field distribution measuring instrument Funato, Hiroki; Suga, Takashi; Uesaka, Kouichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7315173 US Patent Document 7,315,173	patent	January 2008
Optically measuring electric field intensities Mitrofanov, Oleg https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7336062 US Patent Document 7,336,062	patent	February 2008
Nanoelectromechanical and microelectromechanical sensors and analyzers Blick, Robert H.; Westphall, Michael S.; Smith, Lloyd M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7408147 US Patent Document 7,408,147	patent	August 2008
SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast Jesse, Stephen; Geohegan, David B.; Guillorn, Michael A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7491934 US Patent Document 7,491,934	patent	February 2009
Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto Ho, Gavin Kar-Fai; Ayazi, Farrokh; Pourkamali, Siavash https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7511870 US Patent Document 7,511,870	patent	March 2009
Nanomechanical Oscillators Fabricated Using Polymeric Nanofiber Templates Czaplewski, David A.; Verbridge, Scott S.; Kameoka, Jun Nano Letters, Vol. 4, Issue 3 https://doi.org/10.1021/nl035149y	journal	March 2004

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