Method of fabricating vertically aligned group III-V nanowires

Wang, George T; Li, Qiming

Method of fabricating vertically aligned group III-V nanowires

Patent · Tue Nov 25 04:00:00 EST 2014

OSTI ID:1164348

Wang, George T; Li, Qiming

A top-down method of fabricating vertically aligned Group III-V micro- and nanowires uses a two-step etch process that adds a selective anisotropic wet etch after an initial plasma etch to remove the dry etch damage while enabling micro/nanowires with straight and smooth faceted sidewalls and controllable diameters independent of pitch. The method enables the fabrication of nanowire lasers, LEDs, and solar cells.

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 8,895,337

Application Number:: 13/743,433

OSTI ID:: 1164348

Country of Publication:: United States

Language:: English

References (8)

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III-nitride core–shell nanowire arrayed solar cells Wierer Jr, Jonathan J.; Li, Qiming; Koleske, Daniel D. Nanotechnology, Vol. 23, Issue 19 https://doi.org/10.1088/0957-4484/23/19/194007	journal	April 2012
Fabrication of InGaN/GaN nanorod light-emitting diodes with self-assembled Ni metal islands Chiu, C. H.; Lu, T. C.; Huang, H. W. Nanotechnology, Vol. 18, Issue 44 https://doi.org/10.1088/0957-4484/18/44/445201	journal	October 2007
Smooth and Vertical Facet Formation for AlGaN-Based Deep-UV Laser Diodes Miller, M. A.; Crawford, M. H.; Allerman, A. A. Journal of Electronic Materials, Vol. 38, Issue 4 https://doi.org/10.1007/s11664-009-0670-1	journal	January 2009
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GaN nanorod light emitting diode arrays with a nearly constant electroluminescent peak wavelength Wang, Cheng-Yin; Chen, Liang-Yi; Chen, Cheng-Pin Optics Express, Vol. 16, Issue 14 https://doi.org/10.1364/OE.16.010549	journal	January 2008
Optical performance of top-down fabricated InGaN/GaN nanorod light emitting diode arrays Li, Qiming; Westlake, Karl R.; Crawford, Mary H. Optics Express, Vol. 19, Issue 25 https://doi.org/10.1364/OE.19.025528	journal	January 2011
High optical quality GaN nanopillar arrays Wang, Y. D.; Chua, S. J.; Tripathy, S. Applied Physics Letters, Vol. 86, Issue 7 https://doi.org/10.1063/1.1861984	journal	January 2005

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