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U.S. Department of Energy
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CRADA Final Report: Development of Negative Heavy Ions for Ion Implantation

Technical Report ·
DOI:https://doi.org/10.2172/1157028· OSTI ID:1157028
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
Accelerator & Fusion Research Division
DOE Contract Number:
AC02-05CH11231
OSTI ID:
1157028
Report Number(s):
LBNL-6736E
Country of Publication:
United States
Language:
English

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