DISPLACEMENT AND THERMAL PERFORMANCE OF LASER-HEATED ASYMMETRIC MEMS ACTUATORS.
Journal Article
·
· Journal of Microelectromechanical Systems
OSTI ID:1148259
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1148259
- Report Number(s):
- SAND2007-4937J; 522902
- Journal Information:
- Journal of Microelectromechanical Systems, Journal Name: Journal of Microelectromechanical Systems
- Country of Publication:
- United States
- Language:
- English
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