Damage of MEMS thermal actuators heated by laser irradiation.

Conference · Mon Nov 01 04:00:00 EST 2004

OSTI ID:964171

Walraven, Jeremy Allen; Klody, Kelly Anne; Sackos, John T; Phinney, Leslie Mary

Optical actuation of microelectromechanical systems (MEMS) is advantageous for applications for which electrical isolation is desired. Thirty-two polycrystalline silicon opto-thermal actuators, optically-powered MEMS thermal actuators, were designed, fabricated, and tested. The design of the opto-thermal actuators consists of a target for laser illumination suspended between angled legs that expand when heated, providing the displacement and force output. While the amount of displacement observed for the opto-thermal actuators was fairly uniform for the actuators, the amount of damage resulting from the laser heating ranged from essentially no damage to significant amounts of damage on the target. The likelihood of damage depended on the target design with two of the four target designs being more susceptible to damage. Failure analysis of damaged targets revealed the extent and depth of the damage.

• Research Organization: Sandia National Laboratories
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 964171
• Report Number(s): SAND2004-5730C
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ACTUATORS
DAMAGE
DESIGN
FAILURE MODE ANALYSIS
LASER-RADIATION HEATING
MICROELECTRONICS
SILICON