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Three Dimensional Nanofabrication with Elastomeric Phase Masks.

Journal Article · · J. Phys. Chem., B
OSTI ID:1148240
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Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1148240
Report Number(s):
SAND2007-3582J; 522750
Journal Information:
J. Phys. Chem., B, Journal Name: J. Phys. Chem., B
Country of Publication:
United States
Language:
English

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