Deep x-ray lithography based processing for micromechanics
Conference
·
OSTI ID:114487
Deep x-ray lithography based fabrication provides a means to fabricate microactuators with useful output forces. High energy x-ray exposure provides a tool for fabrication of the next generation of precision engineered components. Device characterization, materials science, an metrology continue to pose challenges at this scale.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States); Department of Defense, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 114487
- Report Number(s):
- SAND--95-2261C; CONF-951250--1; ON: DE96000709; CNN: NSF Grant ECS-9116566; DOD Contract ONR NOOO14093-1-0911
- Country of Publication:
- United States
- Language:
- English
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