SOI-Enabled MEMS Processes Lead to Novel Mechanical Optical and Atomic Physics Devices.
Conference
·
OSTI ID:1142550
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1142550
- Report Number(s):
- SAND2008-5666C; 511692
- Resource Relation:
- Conference: Proposed for presentation at the 2008 IEEE International SOI Conference held October 6-9, 2008 in New Paltz, NY.
- Country of Publication:
- United States
- Language:
- English
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