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Unifed theory of gas damping of flexible microcantilevers at low pressures spanning the free-molecular transition and slip regimes.

Journal Article · · Applied Physics Letters
OSTI ID:1142372

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1142372
Report Number(s):
SAND2008-6573J; 508934
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters
Country of Publication:
United States
Language:
English

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