Squeeze-film damping of flexible microcantilevers at low ambient pressures.
Conference
·
OSTI ID:942198
- Purdue University
The conclusions of this presentation are: (1) The quality factors of a microcantilever under squeeze-film damping effect were calculated experimentally and theoretically. (2) The quality factors decreased with ambient pressure, but increased with resonant mode number. (3) The proposed theoretical model predicts well the quality factors of higher bending modes of a microcantilever under squeeze-film damping effect.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 942198
- Report Number(s):
- SAND2008-0743C
- Country of Publication:
- United States
- Language:
- English
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